Targets of BaTiO 3 (BT) (50 mm diameter) were prepared starting from BT-commercial powders (99.9%) and particle size of 2 µm, previously dry milled by high energy process (SPEX 8000 mixer mill). The ...
On the other hand, RF power is also capable of sputtering non conductive materials. Pulsed DC is suitable for some techniques such as reactive sputtering. Reactive Sputtering Reactive sputtering ...
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