HORIBA has developed a Phosphorus Oxychloride (POCl3) delivery systems that is being implemented for atmospheric and low pressure diffusion furnaces in Europe and Asia. The system comprises HORIBA’s ...

Tempress a subsidiary of Amtech has developed an alternative atmospheric process called ‘High Density POCl3’ (Phosphorus Diffusion). The HD system benefits from the throughput advantage of small pitch ...

Horiba has received accolades from two of the world s largest photovoltaic cell manufacturers after successfully qualifying systems in Europe and Asia. It has been a great challenge for us to prove to ...

Japan-based Koyo Thermo Systems has announced the sales launch of a new continuous horizontal tube furnace for POCl3 doping of silicon wafers and crystalline solar cells. Until now phosphorous doping ...