Birefringence based light modulator that works in the wavelength region of < 350 nm plays a vital role in DUV beam shaping, high density data storage, semiconductor micro-nano processing and ...

Ultrawide-bandgap semiconductors—such as diamond—are promising for next-generation electronics due to a larger energy gap between the valence and conduction bands, allowing them to handle higher ...

A team led by Prof. SUN Haiding from the University of Science and Technology of China (USTC) developed a vertically integrated micro-scale light-emitting diode (micro-LED) array，which was then ...

The wide bandgap semiconductor-based DUV light source, as a potential solution to mercury lamps, has a number of advantages including low power consumption, high efficiency, compact size, long ...

The production of Photolithography masks, reticles, and other precision optical components free of defects and surface contaminants is crucial in the Lithography (“Litho”) and metrology functional ...