The introduction of several new dielectric materials for high-speed ultra-large-scale integration (ULSI) microelectronics has increased the necessity for metrology tools to measure the ...
In the field of semiconductor fabrication, high-k dielectrics represent a class of materials with a dielectric constant significantly higher than traditional silicon dioxide. These materials are ...
Dielectric materials are vitally important in the function of microelectronic devices, as these materials electrically isolate conductive components from each other in microcircuits. Capacitance ...
Some results have been hidden because they may be inaccessible to you
Show inaccessible results
Feedback